

| ONTO INNOVATION INC | 10/05/2022 AGM | |
|---|---|---|
| 1.01 | Elect Christopher A. Seams - Chair (Non Executive) | For |
| 1.02 | Elect Leo Berlinghieri - Non-Executive Director | For |
| 1.03 | Elect David B. Miller - Non-Executive Director | Oppose |
| 1.04 | Elect Michael P. Plisinski - Chief Executive | For |
| 1.05 | Elect Karen M. Rogge - Non-Executive Director | For |
| 1.06 | Elect May Su - Non-Executive Director | For |
| 1.07 | Elect Christine A. Tsingos - Non-Executive Director | For |
| 2 | Advisory Vote on Executive Compensation | Abstain |
| 3 | Appoint the Auditors | For |