

| ONTO INNOVATION INC | 11/05/2021 AGM | |
|---|---|---|
| 1.1 | Elect Leo Berlinghieri - Non-Executive Director | For |
| 1.2 | Elect Edward J. Brown, Jr. - Non-Executive Director | For |
| 1.3 | Elect David B. Miller - Non-Executive Director | Oppose |
| 1.4 | Elect Michael P. Plisinski - Chief Executive | For |
| 1.5 | Elect Bruce C. Rhine - Non-Executive Director | Oppose |
| 1.6 | Elect Christopher A. Seams - Chair (Non Executive) | For |
| 1.7 | Elect Christine A. Tsingos - Non-Executive Director | For |
| 2 | Advisory Vote on Executive Compensation | Oppose |
| 3 | Appoint Ernst & Young LLP as the Auditors | For |